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Semiconductor

ULTRAPURE WATER

Purified water (UPW) used in ultrapure applications within the microelectronics and semiconductor industries are commonly defined by water specifications from one of the following standards organizations:

  • ASTM (American Society for Testing and Materials) D5127-13,

  • (SEMI) Semiconductor Equipment and Materials Institute C63

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Standards

ASTM D5127-13, Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries classifies water as Type E-1, E-2 and E-3.  The requirements for high-end use are further defined as type E-1.1 and type E-1.2.

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Ultrapure Water
What We Do

What We Do

w3Synergy designs and fabricates the water treatment equipment required by the microelectronics and semiconductor industries.  Often for large-scale applications, purified water is produced in-house using a central treatment system to pretreat the feed water and point-of-use polishing systems to meet water specifications for the desired application.  A properly designed storage and circulation loop is used for microbial control within the distribution system.


An ultrapure water system engineered by w3Synergy can be defined as a treatment train comprised of an array of separation technologies.  The process steps specifically used for ultrapure water are categorized as follows:

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Media Filtration

Chlorine, chloramine, and bromine are disinfectants used in waters supplied by municipalities. Granulated activated carbon (GAC) media is typically used to remove these types of organics from the water. GAC is also an effective method of removing manmade chemicals such as per- and polyfluorinated substances (PFAS).

 

“Softener” media containing ion exchange (IX) resin is used for surface waters containing high levels of hardness (caused by the presence of calcium and magnesium ions). Selective IX resin is also available to remove PFAS.

Media Filtration

Microfiltration

w3Synergy provides cartridge filtration with pore sizes ranging from 1 micron to 5 microns in the pretreatment stages and 0.2μm absolute at the final treatment stages.

Micro Filtration

Membrane Filtration

W3Synergy fabricates a broad range of membrane filtration equipment including ultrafiltration, nanofiltration, and reverse osmosis.

 

Ultrafiltration is used to remove suspended solids (TSS), colloidal material, and removal of bacterial endotoxins and nucleases.


Reverse osmosis is used to lower the level of total dissolved solids (TDS) in supply water due to the presence of ions, salts, and minerals found in the water.  The TDS as measured in parts per million (PPM) will vary in the supply water seasonally and geographically.  Conductivity expressed as microsiemens per centimeter (uS/cm) is another method of monitoring the presence of these dissolved solids. 

RO membranes can reject bacteria, pyrogens, and some organic solids as well.

 

Double-pass RO, where the product (permeate) from the first pass of the RO is further purified using a second (pass) RO, is available to further decrease the conductivity of the water.

 

Full-fit, hot water sanitizable RO membranes remove greater than 99% of the dissolved solids/ions (TDS) from the feed water.  RO membranes are heat set at 85oC at the factory ready for use.

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w3Synergy beverage systems utilize the latest energy-saving low pressure RO membranes along with variable-frequency drives on our pump motors.  To reduce the use of supply or makeup water, w3Synergy skids incorporate integrated concentrate recovery which cuts in half the quantity of brackish water discharged to the sewer.

Membrane Filtration

Electro- Deionization

The EDI process uses a combination of ion-selective membranes and ion-exchange to remove ions remaining in the RO permeate to the desired target of <1.3 µS/cm.  The EDI stack is designed for hot water sanitization.

 

Energy-efficient power supply for the EDI stack operates under constant voltage allowing the current to fluctuate for optimal control of the EDI process.

 

In source waters containing elevated dissolved carbon dioxide, a membrane contactor degassifier may be used upstream to enhance the effectiveness of DI or EDI in the presence of dissolved carbon dioxide.

Electro-Deionization

Disinfection

After the water has been filtered, disinfection is an additional method used to kill any remaining pathogens including parasites, bacteria, or viruses. 

Ultraviolet light (UV) can eliminate trace organics at 185nm and inactivate microorganisms at 254nm.  The oxidation of trace organics results in pure water with low TOC levels

Disinfection

Treated Water Storage and Distribution

w3Synergy fabricates custom-designed Storage & Distribution Systems specific to our client's needs and requirements. The components of these systems typically include Product Storage Tank, Distribution Pump, and Disinfection Loop.

 

A UV sterilizer provides disinfection of pathogens and is sized based on the desired rate of circulation through the loop.  A 0.2μm absolute filter is included in the loop.

 

The injection of ozone into the storage tank is sometimes specified to sanitize the recirculating loop.   Residual ozone can subsequently be destroyed by the UV lamp prior to utilization of the purified water by the production facility.

Treated Water Storage

Clean-In-Place

w3Synergy fabricates both pre-engineered and custom-designed CIP skids for periodic cleaning of RO membrane systems, process & storage tanks, piping, and/or fermentation reactors.  The chemical tanks and pumps on the skid are sized consistent with the application.

Clean in Place

Monitoring & Automation

w3Synergy UPW water treatment systems are fully automated with the option of either Allen Bradley, Siemens or Idec PLC.  Automation allows for remote continuous online monitoring & control.

 

Available on-line instrumentation includes:

  • UV intensity monitor

  • TOC analyzer

  • Bioburden

  • Chlorine

  • pH

  • ORP

  • Conductivity

  • Resistivity

  • Turbidity

  • Pressure

  • Flow

Automation

Contact Us

w3Synergy is ready to help you with your next water purification or water reuse project. 

Contact our engineering team to learn more: 

858.215.4122     

steve@w3synergy.com

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